This NanoLithography software option enables the AFM probe to alter the physical or chemical properties of the surface. Created in LabVIEW and integrated with the AFMControl software. VI’s are available to customers who want to modify the software and create new capabilities.

Description
Model: LITHO
This Lithography Software Option is used for nanolithography. That is, the AFM’s probe is used to alter the physical or chemical properties of the surface.
The software uses a script of commands to move the probe in a pre-determined pattern over a surface. The two commands are: “movement” and “hold”. During a movement and hold command, the voltage and force on the probe can be varied.A MOVEMENT command consists of 5 numbers (no letters) separated by commas:
They represent X, Y, Velocity, Setpoint%, and Z_DAC voltage
X and Y are the coordinates in micron from the image plot.
Velocity is the speed from one point to the next listed point in nm/sec.
Setpoint% is the percent value of the existing setpoint.
Z_DAC voltage is a voltage in the range of 0 to +5V which may be applied to the probe.
A HOLD command consists of 3 numbers (no letters) separated by commas:
They represent Setpoint%, Z_DAC voltage, and Delay Time (ms)
Setpoint% is the percent value of the existing setpoint.
Z_DAC voltage is a voltage in the range of 0 to +5V which may be applied to the probe.
Delay time(ms) is the time in milliseconds that the probe is held in its present position.
A scripting file is a text file that may be created with any program capable of outputting a .txt file. Each motion of the probe required to create the pattern must be added to the .txt file. Complex patterns may be created using a large number of movement and hold commands.
As with all AFMWorkshop software products, this software option is created using VI’s in a LabVIEW™ environment and is integrated with the AFM Control software. The VI’s used to create the software are available to customers who want to modify the lithography software and create new capabilities.
Software
The lithography software window allows a user to load a scripting file. Once loaded, the pattern that will be made is displayed in an image window. When the start button is pressed, the script is implemented and the specifics of each step are listed in the window. A green light is displayed when the script is completed.
Included with the option
PMMA sample
Manual
Plug for rear of unit
Two probes:
AppNANO: Doped Diamond (DD-ACTA-5)
Conductive Diamond Tip – Non-contact mode probe
Material: Si, N-Type, 0.01~0.025 Ohm/cm
Cantilever: L= 125 μ, W=35 μ, T=4.5 μ
Tip Radius: < 150nm, Height: 14-16 μ
f: 200-400KHz, K=25~75 N/m
All atomic force microscopes manufactured by AFMWorkshop include standard scanning AFM modes: vibrating (tapping), non-vibrating (contact), phase scanning, and lateral force mode (LFM), and force distance. Optional modes expand the capability of your atomic force microscope. Besides Lithography, it includes: Conductive AFM, Magnetic Force Microscopy (MFM), and Advanced Force Distance modes. Measuring the conductivity, surface magnetic field, force curves, and manipulation of surfaces are possible with these modes.
AFMWorkshop instruments provide a high level of flexibility for conducting a wide array of tests and experiments, and always include vibrating, non-vibrating, phase and lateral force modes. Additional AFM modes and accessories expand the capabilities of your microscope.
Expand the range of your atomic force microscopy imaging by adding modes and accessories to your AFM.
To learn more about atomic force microscopes, feel free to visit http://www.afmworkshop.com.







